MIT.nano Adds New Instruments to Create and Analyze at the Nanoscale

MIT.nano
October 13, 2022

MIT.nano has added several instruments to its tool set, expanding the facilities’ capabilities at the nanoscale. The tools, located in MIT.nano’s cleanroom and characterization spaces, can be used individually, or they might all be utilized during different stages of one complete project.

“Overall, these tools are important additions to MIT.nano that will help researchers create and analyze at the nanoscale,” says Jorg Scholvin, assistant director for Fab.nano. “Each fills a critical gap in our existing set of capabilities. What’s really exciting is the range — they can all handle the smallest pieces up to 200-millimeter wafers.”

New tools installed at MIT.nano include the Hitachi HF5000 environmental transmission electron microscope, the Arradiance GEMStar ALD system, the Elionix HS50, the Temescal FC-2800 e-beam evaporator, and the Hitachi Regulus 8100 scanning-electron microscope.